Low power high extinction electrothermal MEMS iris VOA

H. Veladi; R. R. A. Syms; H. Zou

doi:10.1117/12.662093

21 April 2006 Low power high extinction electrothermal MEMS iris VOA

H. Veladi, R. R. A. Syms, H. Zou

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860J (2006) https://doi.org/10.1117/12.662093
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Electrothermal actuation provides the long displacement required by an increasing number ofMEMS applications. However, its high power consumption is a limiting factor, especially for applications in which multiple actuators are required. An iris type variable optical attenuator (VOA),⁵ which was recently introduced by our group, is an example of such an application. In this paper we introduce an improved single sided electrothermal design, which reduces the power consumption by a factor of 70%, while at the same time removing an undesired mechanical resonance. The optical performance is also improved by the introduction of a novel aperture shape which provides higher extinction, independent of the process technology.

Citation Download Citation

H. Veladi, R. R. A. Syms, and H. Zou "Low power high extinction electrothermal MEMS iris VOA", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860J (21 April 2006); https://doi.org/10.1117/12.662093

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available