White-light interferometric techniques in microstructure measurement

Kao-Hui Lin; Ya-Hui Hu

doi:10.1117/12.716115

13 October 2006 White-light interferometric techniques in microstructure measurement

Kao-Hui Lin, Ya-Hui Hu

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62800X (2006) https://doi.org/10.1117/12.716115
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

In the optical non-contact measure fields, the white light interferometry technique is well-known. The measure resolutions of vertical and horizontal direction are determined by motion mechanism and grabbed images, respectively. Therefore, to permit measurement resolution of white light interferometry in 3D profile is very important. In this paper, a white light interferometric measurement technique that combines vertical scanning and phase shifting is proposed. High resolution of the vertical scanning technique can grab the images of short pitch displacement. The relationship between interference fringe and changed frequency of these images are solved by the FFT. Then, the interference fringe's center is computed by band-pass filter and maximum power position. The phase shifting is based on five-frame algorithm to acquire fringe order through vertical scanning. In the experiment result, first was used the grating that had calibrated by commercial instrument Talysurf CCI 6000 to calibrate the experiment implement longitudinal resolution, second was measured the roughness calibration gauge of Model SS-NS94/ No. N20674 /Ra 3.0μm. The results show that the resolution is arrived 1nm, it was quite obvious improving the traditional mechanic.

Citation Download Citation

Kao-Hui Lin and Ya-Hui Hu "White-light interferometric techniques in microstructure measurement", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800X (13 October 2006); https://doi.org/10.1117/12.716115

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