Fast surface profiling using monochromatic phase and fringe order in white-light interferometry

Chi-Hong Tung; Chiung-Huei Huang; Ching-Fen Kao; Calvin C. Chang

doi:10.1117/12.678899

14 August 2006 Fast surface profiling using monochromatic phase and fringe order in white-light interferometry

Chi-Hong Tung, Chiung-Huei Huang, Ching-Fen Kao, Calvin C. Chang

Proceedings Volume 6292, Interferometry XIII: Techniques and Analysis; 62921F (2006) https://doi.org/10.1117/12.678899
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

The results of combining the wrapped phase with the fringe order of this phase to increase the precision of white-light interferometry at high scanning speed are presented. Monochromatic phase data are calculated using the Fourier method and the fringe order is determined using a general coherence peak sensing method. A wide scanning interval of 5λ/8 and a narrow-band color filter with a bandwidth of 70 nm are adopted to acquire interferograms. Experiments with an rms repeatability of step height measurement of below 1 nm and a scanning speed of 40 μm/s are performed.

Citation Download Citation

Chi-Hong Tung, Chiung-Huei Huang, Ching-Fen Kao, and Calvin C. Chang "Fast surface profiling using monochromatic phase and fringe order in white-light interferometry", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62921F (14 August 2006); https://doi.org/10.1117/12.678899

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