Photopatternable fluorinated poly(arylene ether ketone) for optical waveguide devices

Jia Jiang; Claire L. Callender; Julian P. Noad; Yinghua Qi; Jianfu Ding; Michael Day

doi:10.1117/12.679556

14 September 2006 Photopatternable fluorinated poly(arylene ether ketone) for optical waveguide devices

Jia Jiang, Claire L. Callender, Julian P. Noad, Yinghua Qi, Jianfu Ding, Michael Day

Proceedings Volume 6331, Linear and Nonlinear Optics of Organic Materials VI; 63310Q (2006) https://doi.org/10.1117/12.679556
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Fluorinated poly(arylene ether)s are attractive for the fabrication of optical waveguide devices for photonic applications due to their low optical attenuation and high thermal stability. A variety of waveguide devices have been fabricated in these polymers through thermal crosslinking followed by a reactive ion etch process. This work reports on the use of a novel fluorinated poly(arylene ether ketone) incorporating tetrafluorostyrol groups for photo-crosslinking. This new molecular design allows sufficient photosensitivity to fabricate waveguides through a UV direct patterning and wet-etch method, offering a fast, convenient and economic approach to making polymer photonic devices. Data concerning the polymer molecular structure and choice of suitable photo-initiators for the fabrication of the devices are presented in this paper. Based upon the optical and thermal properties of the resultant materials it appears that similar degrees of polymer crosslinking can be achieved using the photo-curing process as those using a thermal crosslinking process. High quality waveguide devices with smooth, well-defined sidewalls are demonstrated. Optical characterization of these devices suggests that the waveguide quality is comparable to that of waveguides fabricated using a dry etch process.

Citation Download Citation

Jia Jiang, Claire L. Callender, Julian P. Noad, Yinghua Qi, Jianfu Ding, and Michael Day "Photopatternable fluorinated poly(arylene ether ketone) for optical waveguide devices", Proc. SPIE 6331, Linear and Nonlinear Optics of Organic Materials VI, 63310Q (14 September 2006); https://doi.org/10.1117/12.679556

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KEYWORDS

Waveguides

Polymers

Ultraviolet radiation

Refractive index

Directional couplers

Reactive ion etching

Photonic devices

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