Contouring of surfaces with discontinuities using ESPI

A. W. Koch; A. Purde; M. Jakobi

doi:10.1117/12.695491

15 September 2006 Contouring of surfaces with discontinuities using ESPI

A. W. Koch, A. Purde, M. Jakobi

Proceedings Volume 6341, Speckle06: Speckles, From Grains to Flowers; 634126 (2006) https://doi.org/10.1117/12.695491
Event: Speckle06: Speckles, From Grains to Flowers, 2006, Nimes, France

Abstract

Electronic speckle pattern interferometry (ESPI) can provide accurate contour measurements in the micron range and short measurement times far below one second. Typical surfaces in industrial applications, however, often show discontinuities, like steps or holes. An unambiguous measurement of such surfaces is possible, if the synthetic wavelength is chosen larger than the largest surface step. A long synthetic wavelength, however, introduces a high noise level such that an unambiguous measurement combined with a high accuracy is not possible in any case. Our preferred solution for this problem is the combination of two or more synthetic wavelengths. In contrast to other publications (hierarchical, pixel-wise approach) our area-based approach uses only two synthetic wavelengths minimizing measurement time and device complexity. In this paper we present different methods for merging the phase images of the two synthetic wavelengths into one measurement result combining accuracy and unambiguousness.

Citation Download Citation

A. W. Koch, A. Purde, and M. Jakobi "Contouring of surfaces with discontinuities using ESPI", Proc. SPIE 6341, Speckle06: Speckles, From Grains to Flowers, 634126 (15 September 2006); https://doi.org/10.1117/12.695491

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