Modelling and performance evaluation of a novel optical accelerometer

F. Chen; Z. Salcic; J. H. Wang

doi:10.1117/12.688179

6 October 2006 Modelling and performance evaluation of a novel optical accelerometer

F. Chen, Z. Salcic, J. H. Wang

Proceedings Volume 6352, Optoelectronic Materials and Devices; 63522O (2006) https://doi.org/10.1117/12.688179
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea

Abstract

Accelerometers are one of the important sensors for a number of applications. In this paper, an accelerometer utilizing optical means for sensing the acceleration is introduced. The proposed accelerometer combines micro optical, electrical and mechanical means (MOEMS) to achieve high sensitivity, wide measurable range, as well as minimal losses in optical part. The optical subsystem is a highly integrated system where passive and active components are all monolithically integrated together. Photo-elastic effect and electro-optical modulation are used when sensing and processing the acceleration. The simulation models of the parts of optical subsystem and its parts and the results are also analyzed.

Citation Download Citation

F. Chen, Z. Salcic, and J. H. Wang "Modelling and performance evaluation of a novel optical accelerometer", Proc. SPIE 6352, Optoelectronic Materials and Devices, 63522O (6 October 2006); https://doi.org/10.1117/12.688179

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