Aspects of laser micromachining for sensor prototyping

Phillip J. McMahon; Richard Muscat; Peter Vincent; Alan Wilson

doi:10.1117/12.696536

20 December 2006 Aspects of laser micromachining for sensor prototyping

Phillip J. McMahon, Richard Muscat, Peter Vincent, Alan Wilson

Proceedings Volume 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III; 64150S (2006) https://doi.org/10.1117/12.696536
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia

Abstract

Recent advances in UV laser machining have allowed the development of accurate and rapid prototyping of micro scale devices. Two examples are presented of how modern UV laser micro machining may be applied to novel applications in engineering research and the development of state of the art micro sensors for structural health monitoring. We also show how micro device development is now a rapid process where novel procedures allowing the manual handling of work pieces may be used to make two layer laser machined devices with alignment to tens of microns.

Citation Download Citation

Phillip J. McMahon, Richard Muscat, Peter Vincent, and Alan Wilson "Aspects of laser micromachining for sensor prototyping", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150S (20 December 2006); https://doi.org/10.1117/12.696536

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