MEMS reliability assessment program: progress to date

J. L. Zunino III; D. R. Skelton

doi:10.1117/12.708242

19 January 2007 MEMS reliability assessment program: progress to date

J. L. Zunino III, D. R. Skelton

Proceedings Volume 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; 64630D (2007) https://doi.org/10.1117/12.708242
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the Army and Department of Defense will rely on heavily to achieve these objectives. Current and future military applications of MEMS devices include safety and arming devices, fuzing devices, various guidance systems, sensors/detectors, inertial measurement units, tracking devices, radio frequency devices, wireless RFIDs and network systems, GPSs, radar systems, mobile base systems, satellites, missiles and the like.

Citation Download Citation

J. L. Zunino III and D. R. Skelton "MEMS reliability assessment program: progress to date", Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630D (19 January 2007); https://doi.org/10.1117/12.708242

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