Organic ArF bottom anti-reflective coatings for immersion lithography

Zhong Xiang; Hong Zhuang; Hengpeng Wu; Jianhui Shan; Dave Abdallah; Jian Yin; Salem Mullen; Huirong Yao; Eleazar Gonzalez; Mark Neisser

doi:10.1117/12.710669

6 April 2007 Organic ArF bottom anti-reflective coatings for immersion lithography

Zhong Xiang, Hong Zhuang, Hengpeng Wu, Jianhui Shan, Dave Abdallah, Jian Yin, Salem Mullen, Huirong Yao, Eleazar Gonzalez, Mark Neisser

Author Affiliations +

Proceedings Volume 6519, Advances in Resist Materials and Processing Technology XXIV; 651929 (2007) https://doi.org/10.1117/12.710669
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Substrate reflectivity control plays an important role in immersion lithography. Multilayer bottom anti-reflective coatings (B.A.R.C.s) become necessary. This paper will focus on the recent development in organic ArF B.A.R.C. for immersion lithography. Single layer low k ArF B.A.R.C.s in conjunction with multilayer CVD hard mask and dual layer organic ArF B.A.R.C. application will be discussed. High NA dry and wet lithography data will be presented. We will also present the etch rate data, defect data and out-gassing property of these new B.A.R.C. materials.

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Zhong Xiang, Hong Zhuang, Hengpeng Wu, Jianhui Shan, Dave Abdallah, Jian Yin, Salem Mullen, Huirong Yao, Eleazar Gonzalez, and Mark Neisser "Organic ArF bottom anti-reflective coatings for immersion lithography", Proc. SPIE 6519, Advances in Resist Materials and Processing Technology XXIV, 651929 (6 April 2007); https://doi.org/10.1117/12.710669

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