Optical Monitoring: Comparison Of Different Monitoring Strategies With Respect To The Resulting Reproducibility To The Completed Layer Systems

A Zoller; R Herrmann; W Klug; W Zultzke

doi:10.1117/12.938353

13 October 1986 Optical Monitoring: Comparison Of Different Monitoring Strategies With Respect To The Resulting Reproducibility To The Completed Layer Systems

A Zoller, R Herrmann, W Klug, W Zultzke

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Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938353
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

A broadband antireflection coating on BK 7 was used to investigate the influence of dif-ferent optical monitoring strategies on the reproducibility of the completed layer system. The coating design consisted of 6 alternating layers of MgF₂ and TiO₂ of which 4 layers had optical thicknesses less than a quarterwave. Two different monitoring strategies were tes-ted: single test slide monitoring (all layers on one test slide) and monitoring of each layer on a separate test slide. Each strategy was tested by performing 10 production runs in a completely automated coating system equipped with a monochromatic photometer. The single test slide method proved to be more reproducible for the production of this specific layer system.

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A Zoller, R Herrmann, W Klug, and W Zultzke "Optical Monitoring: Comparison Of Different Monitoring Strategies With Respect To The Resulting Reproducibility To The Completed Layer Systems", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938353

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