Temperature stress impact on power RF MEMS switches

Chloé Bordas; Katia Grenier; David Dubuc; Mathieu Paillard; Jean-Louis Cazaux; Robert Plana

doi:10.1117/12.722010

15 May 2007 Temperature stress impact on power RF MEMS switches

Chloé Bordas, Katia Grenier, David Dubuc, Mathieu Paillard, Jean-Louis Cazaux, Robert Plana

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890V (2007) https://doi.org/10.1117/12.722010
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

In this paper, capacitive RF-MEMS switches topologies are investigated regarding their power handling capabilities. The topologies differ from the ability to handle thermal stress by an optimization of their anchorage arms. A specific meander arms design leads in fact to enhance by a decade the flexibility regarding their thermal expansion. To evaluate the proposed RF-MEMS morphology, a specific thermal stress protocol has been defined and applied from 20°C up to 120°C. The monitoring of air gap, actuation voltage and insertion losses has been performed after each thermal stress in order to check the impact of the temperature on working switch. The main result indicates that a different thermal behavior depending on the MEMS anchorage arms morphology has been obtained.

Citation Download Citation

Chloé Bordas, Katia Grenier, David Dubuc, Mathieu Paillard, Jean-Louis Cazaux, and Robert Plana "Temperature stress impact on power RF MEMS switches", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890V (15 May 2007); https://doi.org/10.1117/12.722010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available