Simulation of the elastic wave propagation in anisotropic microstructures

Juerg Bryner; Jacqueline Vollmann; Dieter M. Profunser; Jurg Dual

doi:10.1117/12.726132

18 June 2007 Simulation of the elastic wave propagation in anisotropic microstructures

Juerg Bryner, Jacqueline Vollmann, Dieter M. Profunser, Jurg Dual

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 661637 (2007) https://doi.org/10.1117/12.726132
Event: Optical Metrology, 2007, Munich, Germany

Abstract

For the interpretation of optical Pump-Probe Measurements on microstructures the wave propagation in anisotropic 3-D structures with arbitrary geometries is numerically calculated. The laser acoustic Pump-Probe technique generates bulk waves in structures in a thermo-elastic way. This method is well established for non-destructive measurements of thin films with an indepth resolution in the order of 10 nm. The Pump-Probe technique can also be used for measurements, e.g. for quality inspection of three-dimensional structures with arbitrary geometries, like MEMS components. For the interpretation of the measurements it is necessary that the wave propagation in the specimen to be inspected can be calculated. Here, the wave propagation for various geometries and materials is investigated. In the first part, the wave propagation in isotropic axisymmetric structures is simulated with a 2-D finite difference formulation. The numerical results are verified with measurements of macroscopic specimens. In a second step, the simulations are extended to 3-D structures with orthotopic material properties. The implemented code allows the calculation of the wave propagation for different orientations of the material axes (orientation of the orthotropic axes relative to the geometry of the structure). Limits of the presented algorithm are discussed and future directions of the on-going research project are presented.

Citation Download Citation

Juerg Bryner, Jacqueline Vollmann, Dieter M. Profunser, and Jurg Dual "Simulation of the elastic wave propagation in anisotropic microstructures", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661637 (18 June 2007); https://doi.org/10.1117/12.726132

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