Paper
23 May 2007 Fabrication of devices for channeling-based high-energy micro-beams
A. Antonini, V. Guidi, G. Martinelli, E. Milan
Author Affiliations +
Proceedings Volume 6634, International Conference on Charged and Neutral Particles Channeling Phenomena II; 66340M (2007) https://doi.org/10.1117/12.741878
Event: International Conference on Charged and Neutral Particles Channeling Phenomena II, 2006, Rome, Italy
Abstract
Presently MeV energy micro-beams are employed to study the cell response to radiation-induced damage. In fact, one of the frontiers is the study of radiobiological effects of particle radiation on human tissues. At relatively low energy (of the order of MeV), micro-beam facilities have been constructed to irradiate living cells with the aim to understand the architecture of biological tissues on radiation response and its behaviour at low dose. Interaction of radiation at high energy (GeV or higher) and its effects have indeed been considered for interplanetary space missions where a human equipage is being submitted to prolonged interaction with direct cosmic radiation. Thus, some particle accelerator laboratories study methods for implementation of micro-beam facilities to address the interaction of high-energy protons and ions with cells. A channeling-based scheme for generation of micro-beams has been proposed in the past; two designs for micro-collimator devices have been considered in this study and preliminary samples have been accordingly produced.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Antonini, V. Guidi, G. Martinelli, and E. Milan "Fabrication of devices for channeling-based high-energy micro-beams", Proc. SPIE 6634, International Conference on Charged and Neutral Particles Channeling Phenomena II, 66340M (23 May 2007); https://doi.org/10.1117/12.741878
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KEYWORDS
Etching

Silicon

Crystals

Deep reactive ion etching

Particles

Semiconducting wafers

Wet etching

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