Fabrication of plasmonic waveguides by nanoimprint and UV lithography

Rasmus B. Nielsen; Alexandra Boltasseva; Anders Kristensen; Sergey I. Bozhevolnyi; Valentyn S. Volkov; Irene Fernandez Cuesta; Anna Klukowska

doi:10.1117/12.762999

6 February 2008 Fabrication of plasmonic waveguides by nanoimprint and UV lithography

Rasmus B. Nielsen, Alexandra Boltasseva, Anders Kristensen, Sergey I. Bozhevolnyi, Valentyn S. Volkov, Irene Fernandez Cuesta, Anna Klukowska

Author Affiliations +

Proceedings Volume 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics; 688304 (2008) https://doi.org/10.1117/12.762999
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

We present a nanoimprint lithography based method for the fabrication of plasmonic waveguides in the form of V-grooves in a metal surface which support propagation of channel plasmon polaritons (CPPs). The developed method is compatible with large scale production, easily adaptable to different device designs and offers wafer-scale parallel fabrication of plasmonic components. The metal quality is improved in terms of surface roughness when compared to previous demonstrations where grooves were made by direct milling of metal, and the design allows easy fiber access at both ends of the waveguide. We demonstrate the design, fabrication and scanning near-field optical characterization of channel plasmon polariton waveguides at telecom wavelengths. Optical characterization of the fabricated waveguides shows low-loss (propagation length ~ 120 μm) CPP guiding.

Citation Download Citation

Rasmus B. Nielsen, Alexandra Boltasseva, Anders Kristensen, Sergey I. Bozhevolnyi, Valentyn S. Volkov, Irene Fernandez Cuesta, and Anna Klukowska "Fabrication of plasmonic waveguides by nanoimprint and UV lithography", Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 688304 (6 February 2008); https://doi.org/10.1117/12.762999

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available