Support for microsystems simulation: Are we watching the clock?

C. K. Drummond; F. J. Lisy

doi:10.1117/12.764500

19 February 2008 Support for microsystems simulation: Are we watching the clock?

C. K. Drummond, F. J. Lisy

Proceedings Volume 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII; 68840S (2008) https://doi.org/10.1117/12.764500
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Real world Microsystems devices are multi-disciplinary, adaptive, and non-linear. Along the critical development path of Microsystems is a conspicuous absence of materials data, including materials compatibility and life models. To advance the state-of-the art in simulation, ASM has completed the first of three phases of a materials database development effort. The "strides and stumbles" associated with the database are discussed and opportunities for collaboration identified, particularly in the area of material reliability and harsh environment life prediction efforts. A materials database can benefit systems design and simulation efforts, but a phased approach to this undertaking is essential. Case-studies originally intended to validate the database became a surprising component of development strategy. ASM is seeking and welcomes opportunities for collaboration with other research groups as this interdisciplinary project moves forward.

Citation Download Citation

C. K. Drummond and F. J. Lisy "Support for microsystems simulation: Are we watching the clock?", Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840S (19 February 2008); https://doi.org/10.1117/12.764500

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