Design and modeling of nanophotonic beam structures as optical NEMS sensors

Chengkuo Lee; Jayaraj Thillaigovindan; Aibin Yu; Rohit Radhakrishnan; Chii-Chang Chen; Ya-Ting Chao; John H. Lau

doi:10.1117/12.762049

1 February 2008 Design and modeling of nanophotonic beam structures as optical NEMS sensors

Chengkuo Lee, Jayaraj Thillaigovindan, Aibin Yu, Rohit Radhakrishnan, Chii-Chang Chen, Ya-Ting Chao, John H. Lau

Proceedings Volume 6900, Quantum Sensing and Nanophotonic Devices V; 690012 (2008) https://doi.org/10.1117/12.762049
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

Silicon photonic crystal (PhC) waveguide based resonator is designed by introducing a micro-cavity within the line defect so as to form the resonant band gap structure for PhC. Free-standing silicon beam comprising this nanophotonic resonator structure is investigated. The output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. The resonant wavelength shift in the output spectrum is a function of force loading at the center of a suspended beam with PhC waveguide resonator. The sensing capability of this new nanomechanical sensor is derived as that vertical deformation is about 20nm at center and the smallest strain is 0.005% for defect length.

Citation Download Citation

Chengkuo Lee, Jayaraj Thillaigovindan, Aibin Yu, Rohit Radhakrishnan, Chii-Chang Chen, Ya-Ting Chao, and John H. Lau "Design and modeling of nanophotonic beam structures as optical NEMS sensors", Proc. SPIE 6900, Quantum Sensing and Nanophotonic Devices V, 690012 (1 February 2008); https://doi.org/10.1117/12.762049

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KEYWORDS

Silicon

Sensors

Resonators

Waveguides

Refractive index

Bridges

Nanoelectromechanical systems

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