DfM lessons learned from altPSM design

Lars Liebmann; Zak Baum; Ioana Graur; Don Samuels

doi:10.1117/12.771974

4 March 2008 DfM lessons learned from altPSM design

Lars Liebmann, Zak Baum, Ioana Graur, Don Samuels

Proceedings Volume 6925, Design for Manufacturability through Design-Process Integration II; 69250C (2008) https://doi.org/10.1117/12.771974
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

The design challenges associated with alternating phase shifted mask lithography are discussed, solutions which had been developed to address these challenges are reviewed, and parallels to current design for manufacturability implementation issues are identified. Leveraging these insights, the positive attributes of a well integrated design for manufacturability enhanced design flow are proposed. Specific topics covered in the paper are: the need to complement error-detection with streamlined layout-correction, the risk of providing too much unstable information too early in the design optimization flow, the efficiencies of prescriptive 'correct-by-construction' solutions, and the need for seamless integration into existing design flows. For the benefit of the non-lithographer, the discussion of these detailed topics is preceded by a brief review of alternating phase shifted mask lithography principles and benefits.

Citation Download Citation

Lars Liebmann, Zak Baum, Ioana Graur, and Don Samuels "DfM lessons learned from altPSM design", Proc. SPIE 6925, Design for Manufacturability through Design-Process Integration II, 69250C (4 March 2008); https://doi.org/10.1117/12.771974

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available