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The results of experimental investigations of a volume avalanche discharge initiated by an e-beam (VADIEB) and
surface layer of Cu and AlBe foils modifications at the plasma action of VADIEB are given. The volume discharge in
the air of atmosphere pressure formed in the gap with the cathode having small curvature radius and with high voltage
pulses of nanosecond duration and positive and negative polarity. A supershort avalanche electron beam (SAEB) with
formation conditions in gases under atmospheric pressure have been investigated. It is proved that the surface layer is
cleared of carbon at foil treatment, and atoms of oxygen penetrate into a foil. It is show that the cleaning depth depends
on polarity of voltage pulses. At positive polarity of a copper foil electrode the cleaning is observed at the depth over 50
nm, and atoms of oxygen penetrate at the depth up to 25 nm. Plasma of the superpower volume discharge of
nanosecond duration with a specific excitation power of hundreds of MW/cm3, and SAEB, and the discharge plasma
radiation of various spectral ranges (including UV, VUV and X-ray) has the influence on the anode. The supershort
avalanche electronic beam is generated only at negative polarity of a voltage pulse on an electrode with a small radius
of curvature. SAEB influence on modifications of the copper foil surface is registered. VADIEB is easily realized in
various gases and at various pressures, and, at gas pressure decrease the density of the beam current in helium can
achieve 2 kA/cm2. It allows predicting an opportunity of VADIEB application for metal surface modifications in
various technological processes, and for surface dielectric modifications at the certain design of the anode.
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