UV beam shaper alignment sensitivity: grayscale versus binary designs

Todd E. Lizotte

doi:10.1117/12.796080

11 September 2008 UV beam shaper alignment sensitivity: grayscale versus binary designs

Todd E. Lizotte

Proceedings Volume 7062, Laser Beam Shaping IX; 70620K (2008) https://doi.org/10.1117/12.796080
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

What defines a good flat top beam shaper? What is more important; an ideal flat top profile or ease of alignment and stability? These are the questions designers and fabricators can not easily define, since they are a function of experience. Anyone can generate a theoretical beam shaper design and model it until it is clear that on paper the design looks good and meets the general needs of the end customer. However, the method of fabrication can add a twist that is not fully understood by either party until the beam shaper is actually tested for the first time in a system and also produced in high volume. This paper provides some insight into how grayscale and binary fabrication methods can produce the same style of beam shaper, with similar beam shaping performance; however provide a result wherein each fabricated design has separate degrees of sensitivity for alignment and stability. The paper will explain the design and fabrication approach for the two units and present alignment and testing data to provide a contrast comparison. Further data will show that over twenty sets of each fabricated design there is a consistency to the sensitivity issue. An understanding of this phenomenon is essential when considering the use of beam shapers on production equipment that is dedicated to producing micron-precision features within high value microelectronic and consumer products. We will present our findings and explore potential explanations and solutions.

Citation Download Citation

Todd E. Lizotte "UV beam shaper alignment sensitivity: grayscale versus binary designs", Proc. SPIE 7062, Laser Beam Shaping IX, 70620K (11 September 2008); https://doi.org/10.1117/12.796080

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