Multi-wavelength interferometer for high accuracy measurement of long gauge blocks

Michal Wengierow; Leszek Salbut; Anna Pakula; Dariusz Lukaszewski

doi:10.1117/12.794871

11 August 2008 Multi-wavelength interferometer for high accuracy measurement of long gauge blocks

Michal Wengierow, Leszek Salbut, Anna Pakula, Dariusz Lukaszewski

Proceedings Volume 7064, Interferometry XIV: Applications; 70640N (2008) https://doi.org/10.1117/12.794871
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

In the paper the multiwavelength interferometer with automatic data analysis based on phase fraction method is described. It is used to extend measurement range without losing sensitivity, especially to calibrate long gauge blocks. Numerical simulations and experimental work results have been shown to confirm proper functioning of this method. However, stabilization of environmental conditions and light sources has significant influence on correctness of measurement results. To match those requirements measurement system, which will be built for Polish Central Office of Measures, has been designed. This design is based on Twyman-Green interferometer and assumes usage of two highly stabilized laser sources. Optical and mechanical design of this system has been shown. Moreover, system for monitoring and stabilization of environmental conditions is required.

Citation Download Citation

Michal Wengierow, Leszek Salbut, Anna Pakula, and Dariusz Lukaszewski "Multi-wavelength interferometer for high accuracy measurement of long gauge blocks", Proc. SPIE 7064, Interferometry XIV: Applications, 70640N (11 August 2008); https://doi.org/10.1117/12.794871

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