Paper
2 September 2008 Mitigating molecular and particulate contamination via surface energy
Mark S. Crowder, Christina Haley
Author Affiliations +
Abstract
Amorphous fluorocarbon (a-C:F) thin films have been developed that protect surfaces from molecular and particulate contamination. The surface energies of the thin films are low and primarily dispersive in origin with values of energies measured to be as low as 18 mJ/m2 (17.5 dispersive, 0.5 polar). The films are transparent to visible light and have a refractive index of ~1.4. The a-C:F surface energy was found to be thermally stable when exposed to temperatures that range from 77°K to 400°C. Molecular absorption rates are significantly reduced on gold surfaces when over-coated with an a-C:F thin film. The adhesion force of particles to the a-C:F surface is low and can dramatically decrease the susceptibility of particles to adhere to surfaces over-coated with the thin film. The robust nature of the diamond-like thin films make them candidates for protecting aerospace surfaces, such as optical surfaces, from contamination.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark S. Crowder and Christina Haley "Mitigating molecular and particulate contamination via surface energy", Proc. SPIE 7069, Optical System Contamination: Effects, Measurements, and Control 2008, 706909 (2 September 2008); https://doi.org/10.1117/12.793442
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CITATIONS
Cited by 2 scholarly publications and 1 patent.
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KEYWORDS
Thin films

Contamination

Coating

Particles

Silicon

Silicon films

Semiconducting wafers

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