Sol-gel derived RIB waveguides

Paweł Karasiński; Roman Rogoziński

doi:10.1117/12.804514

13 June 2008 Sol-gel derived RIB waveguides

Paweł Karasiński, Roman Rogoziński

Proceedings Volume 7120, Optical Fibers and Their Applications 2008; 71200C (2008) https://doi.org/10.1117/12.804514
Event: Optical Fibers and Their Applications 2008, 2008, Bialowieza, Poland

Abstract

RIB waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO₂:TiO₂ which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the layers SiO₂:TiO₂ was carried out in water solutions of ammonia fluoride. The paper presents results of theoretical analysis, technological characteristics, and power distributions in the obtained strip waveguides.

Citation Download Citation

Paweł Karasiński and Roman Rogoziński "Sol-gel derived RIB waveguides", Proc. SPIE 7120, Optical Fibers and Their Applications 2008, 71200C (13 June 2008); https://doi.org/10.1117/12.804514

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