New evaluation method of plane line profile error

Yongguo Sun; Yongquan Sun; Jianying Guo

doi:10.1117/12.819755

31 December 2008 New evaluation method of plane line profile error

Yongguo Sun, Yongquan Sun, Jianying Guo

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71305F (2008) https://doi.org/10.1117/12.819755
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

Considering the measurement accuracy of the line profile error is affected because of the position error between the design benchmarks and measurement benchmarks during the measurement process, this paper brings forward a new method to calculate the plane line profile error precisely based on the complex figure optimization design. Use the indirect method of coordinate transformation to establish the objective function, and adopt complex figure algorithm and Newton-Iterative method to optimize fitting turning point, then to evaluate the plane line profile error precisely. Eliminate the effect of the position error betwe the design benchmarks and the measurement benchmarks by auto-spotting in the measurement process and ensure measurement accuracy. This method is highly feasible, precise and convenient to use.

Citation Download Citation

Yongguo Sun, Yongquan Sun, and Jianying Guo "New evaluation method of plane line profile error", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71305F (31 December 2008); https://doi.org/10.1117/12.819755

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