Functions and three dimensional parameters of surface texture

Qunfen Qi; Xiaojun Liu; Xiangqian Jiang

doi:10.1117/12.811358

12 January 2009 Functions and three dimensional parameters of surface texture

Qunfen Qi, Xiaojun Liu, Xiangqian Jiang

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 713303 (2009) https://doi.org/10.1117/12.811358
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of 'zero wear' volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

Citation Download Citation

Qunfen Qi, Xiaojun Liu, and Xiangqian Jiang "Functions and three dimensional parameters of surface texture", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713303 (12 January 2009); https://doi.org/10.1117/12.811358

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