Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter with double feedback control for real-time distance measurement

Osami Sasaki; Daiki Matsubara; Takamasa Suzuki

doi:10.1117/12.817855

2 February 2009 Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter with double feedback control for real-time distance measurement

Osami Sasaki, Daiki Matsubara, Takamasa Suzuki

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Proceedings Volume 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications; 71600L (2009) https://doi.org/10.1117/12.817855
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

Optical path difference (OPD) and amplitude of a sinusoidal wavelength-scanning (SWS) are controlled with double feedback control system in an SWS interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength. An acousto-optic tunable filter (AOTF) is adopted as a wavelength-scanning device. The frequency of the SWS is 10 KHZ, and the measurement time required to reach a stable point of the control system is about 7ms. The measurement range is from 65 m to 190 m with the measurement error less than 4nm.

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Osami Sasaki, Daiki Matsubara, and Takamasa Suzuki "Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter with double feedback control for real-time distance measurement", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71600L (2 February 2009); https://doi.org/10.1117/12.817855

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KEYWORDS

Feedback control

Interferometers

Distance measurement

Control systems

Acousto-optics

Tunable filters

Feedback signals

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