Large-aperture excilamps for microelectronic applications

Dmitry V. Schitz; Mikhail I. Lomaev; Victor S. Skakun; Victor F. Tarasenko

doi:10.1117/12.807822

24 February 2009 Large-aperture excilamps for microelectronic applications

Dmitry V. Schitz, Mikhail I. Lomaev, Victor S. Skakun, Victor F. Tarasenko

Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 720119 (2009) https://doi.org/10.1117/12.807822
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

A windowless excilamp, a xenon excilamp with the high specific power of radiation and an air-cooling KrCl excilamp for microelectronic applications are described. The excilamps have the total radiating surface up to 900 cm². The VUV specific average power of a windowless excilamp is 3 mW/cm² and 5 mW/cm² for argon (λ ~ 126 nm) and krypton (λ~146 nm) accordingly at distance of 3 cm from the emitting surface. The xenon excilamp (λ ~ 172 nm) has 50 W of the average total VUV power and 120 mW/cm² of density and the large-aperture air-cooling KrCl (λ ~222 nm) excilamp has 30 mW/cm² of the radiation density and the radiation homogeneity 12 %.

Citation Download Citation

Dmitry V. Schitz, Mikhail I. Lomaev, Victor S. Skakun, and Victor F. Tarasenko "Large-aperture excilamps for microelectronic applications", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 720119 (24 February 2009); https://doi.org/10.1117/12.807822

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