High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis

Se Hyun Ahn; L. Jay Guo

doi:10.1117/12.809821

24 February 2009 High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis

Se Hyun Ahn, L. Jay Guo

Proceedings Volume 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II; 72050U (2009) https://doi.org/10.1117/12.809821
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Continuous Roll-to-Roll NanoImprint Lithography (R2RNIL) provides greatly improved throughput by overcoming the challenges faced by conventional NIL in maintaining pressure uniformity and successful large-area imprinting and demolding. We present continuous imprinting of nanoscale structures with linewidth down to 70nm on a flexible plastic substrate. Our new process used a flexible and non-sticking fluoropolymer mold, and fast thermal and UV curable liquid resist materials. In addition, pattern quality in continuous R2RNIL process according to two different mold-separation directions has been analytically investigated.

Citation Download Citation

Se Hyun Ahn and L. Jay Guo "High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 72050U (24 February 2009); https://doi.org/10.1117/12.809821

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available