Novel unimorph deformable mirror for solid state laser resonators

S. Verpoort; P. Welp; U. Wittrock

doi:10.1117/12.810135

23 February 2009 Novel unimorph deformable mirror for solid state laser resonators

S. Verpoort, P. Welp, U. Wittrock

Proceedings Volume 7209, MEMS Adaptive Optics III; 72090N (2009) https://doi.org/10.1117/12.810135
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

We present a novel unimorph deformable mirror with a diameter of only 10 mm that will be used in adaptive resonators of high power solid state lasers. The relationship between applied voltage and deformation of a unimorph mirror depends on the piezoelectric material properties, layer thicknesses, boundary conditions, and the electrode pattern. An analytical equation for the deflection of the piezoelectric unimorph structure is derived, based on the electro-elastic and thin plate theory. The validity of the proposed analytical model has been proven by numerical finite-element modelling and experimental results. Our mirror design has been optimized to obtain the highest possible stroke and a high resonance frequency.

Citation Download Citation

S. Verpoort, P. Welp, and U. Wittrock "Novel unimorph deformable mirror for solid state laser resonators", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090N (23 February 2009); https://doi.org/10.1117/12.810135

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