Analysis of carbon deposition on multilayer mirrors by using two different beamlines

Takahiro Nakayama; Akira Miyake; Hiromitsu Takase; Shigeru Terashima; Takashi Sudo; Yutaka Watanabe; Yasuaki Fukuda

doi:10.1117/12.813587

18 March 2009 Analysis of carbon deposition on multilayer mirrors by using two different beamlines

Takahiro Nakayama, Akira Miyake, Hiromitsu Takase, Shigeru Terashima, Takashi Sudo, Yutaka Watanabe, Yasuaki Fukuda

Proceedings Volume 7271, Alternative Lithographic Technologies; 72713P (2009) https://doi.org/10.1117/12.813587
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

It is very important to mitigate oxidation of multilayer mirrors (MLMs) and carbon deposition onto MLMs to extend the lifetime of EUV exposure tool. In order to estimate the lifetime, we have to figure out scaling law. Previous results at EUVA have shown that carbon deposition rate on MLMs is not proportional to every hydrocarbon partial pressure and every EUV intensity^3-4. In this study we focused on carbon deposition on Si-capped multilayer mirror. We made experiments of EUV irradiation to the MLMs using two different apparatuses. One is connected to a beamline (SBL-2) of synchrotron radiation facility Super-ALIS in the NTT Atsugi research and development center, and the other is connected to a beamline (BL9) of synchrotron radiation facility New SUBARU in the University of Hyogo. As the result of experiments, we found that different carbon deposition rate occurred on the different beamlines, although they have the same average EUV intensity. We present differences of carbon deposition rate on MLMs between two different beamlines and estimation of carbon deposition rate on EUV tool analyzing dependences of carbon deposition rate on characteristics of EUV source.

Citation Download Citation

Takahiro Nakayama, Akira Miyake, Hiromitsu Takase, Shigeru Terashima, Takashi Sudo, Yutaka Watanabe, and Yasuaki Fukuda "Analysis of carbon deposition on multilayer mirrors by using two different beamlines", Proc. SPIE 7271, Alternative Lithographic Technologies, 72713P (18 March 2009); https://doi.org/10.1117/12.813587

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