Developing an uncertainty analysis for optical scatterometry

Thomas A. Germer; Heather J. Patrick; Richard M. Silver; Benjamin Bunday

doi:10.1117/12.814835

23 March 2009 Developing an uncertainty analysis for optical scatterometry

Thomas A. Germer, Heather J. Patrick, Richard M. Silver, Benjamin Bunday

Proceedings Volume 7272, Metrology, Inspection, and Process Control for Microlithography XXIII; 72720T (2009) https://doi.org/10.1117/12.814835
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

This article describes how an uncertainty analysis may be performed on a scatterometry measurement. A method is outlined for propagating uncertainties through a least-squares regression. The method includes the propagation of the measurement noise as well as estimates of systematic effects in the measurement. Since there may be correlations between the various parameters determined by the measurement, a method is described for visualizing the uncertainty in the extracted profile. The analysis is performed for a 120 nm pitch grating, consisting of photoresist lines 120 nm high, 45 nm critical dimension, and 88° side wall angle, measured with a spectroscopic rotating compensator ellipsometer. The results suggest that, while scatterometry is very precise, there are a number of sources of systematic errors that limit its absolute accuracy. Addressing those systematic errors may significantly improve scatterometry measurements in the future.

Citation Download Citation

Thomas A. Germer, Heather J. Patrick, Richard M. Silver, and Benjamin Bunday "Developing an uncertainty analysis for optical scatterometry", Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72720T (23 March 2009); https://doi.org/10.1117/12.814835

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available