Swept laser interferometric interrogation

Jeff Bush

doi:10.1117/12.819518

27 April 2009 Swept laser interferometric interrogation

Jeff Bush

Proceedings Volume 7316, Fiber Optic Sensors and Applications VI; 73160S (2009) https://doi.org/10.1117/12.819518
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

A high-speed, swept-laser interferometric interrogation approach is introduced. Dynamic measurements of weak Fabry-Perot or Fizeau type interferometers with gap ranges of 50 um to 1 mm up to 70 Ksamples per second are demonstrated and discussed. Displacement resolution is < 1 pm/rt-Hz. This has application with MEMS and FPPI type sensors.

Citation Download Citation

Jeff Bush "Swept laser interferometric interrogation", Proc. SPIE 7316, Fiber Optic Sensors and Applications VI, 73160S (27 April 2009); https://doi.org/10.1117/12.819518

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available