Phase object power mapping and cosmetic defects enhancement by Fourier-based deflectometry

D. Beghuin; X. Dubois; L. Joannes

doi:10.1117/12.827670

17 June 2009 Phase object power mapping and cosmetic defects enhancement by Fourier-based deflectometry

D. Beghuin, X. Dubois, L. Joannes

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73890M (2009) https://doi.org/10.1117/12.827670
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Optical deflectometry, likewise many other optical methods, permits to reconstruct the wavefront deformations induced by a refractive or a phase object. In this paper, a Fourier based deflectometry method is presented. A telecentric imaging system acquires pictures of a grating being the superposition of two crossed Ronchi rulings of the same spatial frequency. The object under test is inserted in the optical path between the grating and the telecentric imaging system. The presented Fourier based image analysis permits to extract the wavefront derivatives, and therefore permits to reconstruct the wavefront or the local power of the object. In this paper, the method is illustrated on several free form thermoplasic elements, the sensitivity is determined experimentally, the precision is analyzed and the ability to characterize cosmetic defects is evaluated.

Citation Download Citation

D. Beghuin, X. Dubois, and L. Joannes "Phase object power mapping and cosmetic defects enhancement by Fourier-based deflectometry", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73890M (17 June 2009); https://doi.org/10.1117/12.827670

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