A new digital silicon MEMS gyroscope

L. F. Wu; Zh. Peng; Wei Zhang; F. X. Zhang

doi:10.1117/12.839936

20 October 2009 A new digital silicon MEMS gyroscope

L. F. Wu, Zh. Peng, Wei Zhang, F. X. Zhang

Proceedings Volume 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering; 74935X (2009) https://doi.org/10.1117/12.839936
Event: Second International Conference on Smart Materials and Nanotechnology in Engineering, 2009, Weihai, China

Abstract

This paper presents a new, digital silicon MEMS gyroscope, which consists of micro-sensor, signal processing circuit and micro-processor (MSC1214). The gyroscope structure allows it to achieve rolling rate, yaw angular rate and pitch angular rate of rotating carrier. That is, it can detect the attitude of a rotating carrier. The key techniques of MEMS gyroscope, including sensing construct, sensing principle, signal processing circuit design and test results are presented. The test results show that the non-linearity of the gyroscope is less than 0.5% and sensitivity of the gyroscope is 0.01°/s at atmospheric pressure, measuring range of yaw (or pitch) angular rate and rolling rate of rotating carrier is from -500 ° /s to +500 °/s and 0 Hz to 40 Hz, respectively.

Citation Download Citation

L. F. Wu, Zh. Peng, Wei Zhang, and F. X. Zhang "A new digital silicon MEMS gyroscope", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935X (20 October 2009); https://doi.org/10.1117/12.839936

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