Motion blurred image restoration algorithm for IC wire bonder

Yixin Zhang; Shun Wang; Xuping Zhang; Xuejun Lu

doi:10.1117/12.838152

24 November 2009 Motion blurred image restoration algorithm for IC wire bonder

Yixin Zhang, Shun Wang, Xuping Zhang, Xuejun Lu

Proceedings Volume 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology; 75130C (2009) https://doi.org/10.1117/12.838152
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

Chip packaging is an important process during IC manufacturing. Wire bonders are key equipments of chip packaging. The manually type of wire bonders can be updated to automatic with a pattern recognition system (PRS). However, the resolution of PRS is quite sensitive to the mechanism's trembling. Additional waiting time has to be taken before the image sensor can take a shoot, which limits the wire bonder's productivity. In this paper, method for motion blurred image restoration is presented. The method uses point spread function (PSF) learning to estimate the degradation function and power spectrum analyze to estimate the image's signal to noise rate (SNR). Experimental results are given to illustrate the proposed image restoration algorithm.

Citation Download Citation

Yixin Zhang, Shun Wang, Xuping Zhang, and Xuejun Lu "Motion blurred image restoration algorithm for IC wire bonder", Proc. SPIE 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology, 75130C (24 November 2009); https://doi.org/10.1117/12.838152

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