Micro mixer based on surface acoustic wave driving

Guan Zhang; Yigui Li; Junfeng Zhang; Chunshen Yang; Jingquan Liu

doi:10.1117/12.885452

28 December 2010 Micro mixer based on surface acoustic wave driving

Guan Zhang, Yigui Li, Junfeng Zhang, Chunshen Yang, Jingquan Liu

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75441O (2010) https://doi.org/10.1117/12.885452
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

A resonance frequency of 8.9MHz copper Interdigital Transducer (IDT) is fabricated on a 127.8°YX type LiNbO₃ substrate by lift-off process and the rapid droplet mixing is experimentally realized using the surface acoustic wave(SAW). The droplet mixing principle and the manufacturing process of the mixer are illustrated in detail. The droplet generates one swirl when only portion of the droplet is located on the saw propagating surface. The droplet generates two swirls when the whole of droplet is located on the saw propagating surface. The mixing between red particles with an average diameter of 1.5μm and a droplet with a volume of 3 μl is successfully implemented. No matter the droplet covers whole or just partly the saw propagating surface, the mixing process can be completed in one second when the applied driving power is 9W. The applications of SAW micro fluidics should be greatly enhanced using the rapid mixing process proposed in this paper.

Citation Download Citation

Guan Zhang, Yigui Li, Junfeng Zhang, Chunshen Yang, and Jingquan Liu "Micro mixer based on surface acoustic wave driving", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75441O (28 December 2010); https://doi.org/10.1117/12.885452

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