Coaxial real-time metrology and gas assisted laser micromachining: process development, stochastic behavior, and feedback control

Paul J. L. Webster; Ben Y. C. Leung; Joe X. Z. Yu; Mitchell D. Anderson; Tony P. Hoult; James M. Fraser

doi:10.1117/12.842409

16 February 2010 Coaxial real-time metrology and gas assisted laser micromachining: process development, stochastic behavior, and feedback control

Paul J. L. Webster, Ben Y. C. Leung, Joe X. Z. Yu, Mitchell D. Anderson, Tony P. Hoult, James M. Fraser

Author Affiliations +

Proceedings Volume 7590, Micromachining and Microfabrication Process Technology XV; 759003 (2010) https://doi.org/10.1117/12.842409
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

The stochastic effects of assist gas in QCW and pulsed laser machining (percussion drilling) in steel are measured with a novel in situ high speed low coherence imaging system. Real-time imaging is delivered coaxially with machining energy and assist gas revealing relaxation and melt flow dynamics over microsecond timescales and millimeter length scales with ~10 micrometer resolution. Direct measurement of cut rate and repeatability avoids post cut analysis and iterative process development. Feedback from the imaging system can be used to overcome variations in relaxation and guides blind hole cutting.

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Paul J. L. Webster, Ben Y. C. Leung, Joe X. Z. Yu, Mitchell D. Anderson, Tony P. Hoult, and James M. Fraser "Coaxial real-time metrology and gas assisted laser micromachining: process development, stochastic behavior, and feedback control", Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 759003 (16 February 2010); https://doi.org/10.1117/12.842409

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