Application of nanosphere lithography to the fabrication of nanorod LEDs and to the performance enhancementof conventional LEDs

Yun-Wei Cheng; Tzu-Chun Lu; Min-Yung Ke; Kun-Mao Pan; Liang-Yi Chen; Hung-Li Chiang; Ying-Yuan Huang; JianJang Huang

doi:10.1117/12.851888

25 November 2009 Application of nanosphere lithography to the fabrication of nanorod LEDs and to the performance enhancement of conventional LEDs

Yun-Wei Cheng, Tzu-Chun Lu, Min-Yung Ke, Kun-Mao Pan, Liang-Yi Chen, Hung-Li Chiang, Ying-Yuan Huang, JianJang Huang

Author Affiliations +

Proceedings Volume 7635, Display, Solid-State Lighting, Photovoltaics, and Optoelectronics in Energy; 763506 (2009) https://doi.org/10.1117/12.851888
Event: Asia Communications and Photonics, 2009, Shanghai, Shanghai , China

Abstract

The process of nanosphere lithography was developed and applied to LED epistructure. We demonstrated p-i-n nanorod LED arrays with some specific characteristics. Moreover, LEDs encompassed with self-aligned nanorods are fabricated. Light diffraction behaviors are characterized. The results are explained by photonic crystal effect.

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Yun-Wei Cheng, Tzu-Chun Lu, Min-Yung Ke, Kun-Mao Pan, Liang-Yi Chen, Hung-Li Chiang, Ying-Yuan Huang, and JianJang Huang "Application of nanosphere lithography to the fabrication of nanorod LEDs and to the performance enhancement of conventional LEDs", Proc. SPIE 7635, Display, Solid-State Lighting, Photovoltaics, and Optoelectronics in Energy, 763506 (25 November 2009); https://doi.org/10.1117/12.851888

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KEYWORDS

Nanorods

Light emitting diodes

Reflectors

Gallium nitride

Silica

Nanolithography

Lithography

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