Research on the precision measurement of super-low reflectivity

Hao-yu Yuan; Zong-gui Lu; Yan-wen Xia; Zhi-tao Peng; Hua Liu; Long-bo Xu; Zhi-hong Sun; Jun Tang

doi:10.1117/12.866381

12 October 2010 Research on the precision measurement of super-low reflectivity

Hao-yu Yuan, Zong-gui Lu, Yan-wen Xia, Zhi-tao Peng, Hua Liu, Long-bo Xu, Zhi-hong Sun, Jun Tang

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 765665 (2010) https://doi.org/10.1117/12.866381
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Introduced a high-precision measurement of measured the super-low reflectivity and small sampling angle. Using single reflect way measured, and compare with re-swatch. Testing the reflectance of the sampling mirror which be used on TIL, and analyze the error. Research results indicate, the main factor which affect result is energy detector error and energy detector linearity. This methods is easy and have high-precision, it can be used to measure the super-low reflectivity sampling mirror reflectance.

Citation Download Citation

Hao-yu Yuan, Zong-gui Lu, Yan-wen Xia, Zhi-tao Peng, Hua Liu, Long-bo Xu, Zhi-hong Sun, and Jun Tang "Research on the precision measurement of super-low reflectivity", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765665 (12 October 2010); https://doi.org/10.1117/12.866381

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