Paper
5 May 2010 Pixelated spectral filter for integrated focal plane array in the long-wave IR
S. A. Kemme, R. R. Boye, A. A. Cruz-Cabrera, R. D. Briggs, T. R. Carter, S. Samora
Author Affiliations +
Abstract
We present the design, fabrication, and characterization of a pixelated, hyperspectral arrayed component for Focal Plane Array (FPA) integration in the Long-Wave IR. This device contains tens of pixels within a single super-pixel which is tiled across the extent of the FPA. Each spectral pixel maps to a single FPA pixel with a spectral FWHM of 200nm. With this arrayed approach, remote sensing data may be accumulated with a non-scanning, "snapshot" imaging system. This technology is flexible with respect to individual pixel center wavelength and to pixel position within the array. Moreover, the entire pixel area has a single wavelength response, not the integrated linear response of a graded cavity thickness design. These requirements bar tilted, linear array technologies where the cavity length monotonically increases across the device.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. A. Kemme, R. R. Boye, A. A. Cruz-Cabrera, R. D. Briggs, T. R. Carter, and S. Samora "Pixelated spectral filter for integrated focal plane array in the long-wave IR", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791P (5 May 2010); https://doi.org/10.1117/12.849756
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Cited by 2 scholarly publications.
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KEYWORDS
Etching

Semiconducting wafers

Staring arrays

Optical filters

Long wavelength infrared

Mirrors

Thin films

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