Femtosecond laser fabrication of hybrid micro-optical elements and their integration on the fiber tip

Mangirdas Malinauskas; Holger Gilbergs; Albertas Zukauskas; Kastytis Belazaras; Vytautas Purlys; Marius Rutkauskas; Gabija Bickauskaite; Andrej Momot; Domas Paipulas; Roaldas Gadonas; Saulius Juodkazis; Algis Piskarskas

doi:10.1117/12.854396

12 May 2010 Femtosecond laser fabrication of hybrid micro-optical elements and their integration on the fiber tip

Mangirdas Malinauskas, Holger Gilbergs, Albertas Zukauskas, Kastytis Belazaras, Vytautas Purlys, Marius Rutkauskas, Gabija Bickauskaite, Andrej Momot, Domas Paipulas, Roaldas Gadonas, Saulius Juodkazis, Algis Piskarskas

Author Affiliations +

Proceedings Volume 7716, Micro-Optics 2010; 77160A (2010) https://doi.org/10.1117/12.854396
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Femtosecond laser photo-polymerization of zirconium-silicon based sol-gel photopolymer SZ2080 is used to fabricate micro-optical elements with a single and hybrid optical functions. We demonstrate photo-polymerization of the solid immersion and Fresnel lenses. Gratings can be added onto the surface of lenses. The effective refractive index of polymerized structures can be controlled via the volume fraction of polymer. We used woodpile structure with volume fraction of 0.65-0.8. Tailoring of dispersion properties of micro-optical elements by changing filling ratio of polymer are discussed. Direct write approach is used to form such structures on a cover glass and on the tip of an optical fiber. Close matching of refractive indices between the polymer and substrate in visible and near infra red spectral regions (n_SZ₂₀₈₀ = 1.504, n_glass = 1.52) is favorable for such integration. The surface roughness of laser-polymerized resits was ~30 nm (min-max value), which is acceptable for optical applications in the visible range. For the bulk micro-optical elements the efficiency of 3D laser polymerization is increased by a factor ~ (2 - 4) × 10² times (depends on the design) by the shell-formation polymerization: (i) contour scanning for definition of shell-surface, (ii) development for removal of nonfunctional resist, and (iii) UV exposure for the final volumetric polymerization of an enclosed volume.

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Mangirdas Malinauskas, Holger Gilbergs, Albertas Zukauskas, Kastytis Belazaras, Vytautas Purlys, Marius Rutkauskas, Gabija Bickauskaite, Andrej Momot, Domas Paipulas, Roaldas Gadonas, Saulius Juodkazis, and Algis Piskarskas "Femtosecond laser fabrication of hybrid micro-optical elements and their integration on the fiber tip", Proc. SPIE 7716, Micro-Optics 2010, 77160A (12 May 2010); https://doi.org/10.1117/12.854396

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