A non-contact measurement technique to measure micro-surface stress and obtain deformation profiles of the order of 1nm in microcantilever-based structures by single image optical diffraction method

Arindam Phani

doi:10.1117/12.872976

22 September 2010 A non-contact measurement technique to measure micro-surface stress and obtain deformation profiles of the order of 1nm in microcantilever-based structures by single image optical diffraction method

Arindam Phani

Author Affiliations +

Proceedings Volume 7750, Photonics North 2010; 77502C (2010) https://doi.org/10.1117/12.872976
Event: Photonics North 2010, 2010, Niagara Falls, Canada

Abstract

A new method based on analysis of a single diffraction pattern is proposed to measure deflections in micro-cantilever (MC) based sensor probes, achieving typical deflection resolutions of 1nm and surface stress changes of 50μN/m. The proposed method employs a double MC structure where the deflection of one of the micro-cantilevers relative to the other due to surface stress changes results in a linear shift of intensity maxima of the Fraunhofer diffraction pattern of the transilluminated MC. Measurement of such shifts in the intensity maxima of a particular order along the length of the structure can be done to an accuracy of 0.01mm leading to the proposed sensitivity of deflection measurement in a typical microcantilever. This method can overcome the fundamental measurement sensitivity limit set by diffraction and pointing stability of laser beam in the widely used Optical Beam Deflection method (OBDM).

Citation Download Citation

Arindam Phani "A non-contact measurement technique to measure micro-surface stress and obtain deformation profiles of the order of 1nm in microcantilever-based structures by single image optical diffraction method", Proc. SPIE 7750, Photonics North 2010, 77502C (22 September 2010); https://doi.org/10.1117/12.872976

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