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We present theoretical and experimental results of nanohole fabrication on a silicon substrate by plasmonic near field
around multiple gold nanoparticles excited by oblique incidence of femtosecond laser. Using the enhanced near field
around a gold nanoparticle, nanohole can be fabricated on the substrate surface even at the near-infrared laser excitation.
The formation of nanoholes with the near-infrared incident wavelength will open up smart applications for new optical
device fabrication in air. However, the plasmons inside gold nanoparticles are affected by the plasmons of neighboring
gold particles, resulting in an alteration of near-field distribution and the shift of resonant wavelength of plasmons inside
the gold particles. These cause inhomogeneous shape of nanoholes and decrease the near-field intensity on silicon
substrate. Therefore it is necessary to control the direction of plasmon for precise nanohole fabrication. We propose a
new method to reduce plasmon interaction between particles by using p-polarized irradiation at oblique incidence to the
substrate surface. Experimental and theoretical study demonstrated that uniformed nanoholes can be achieved by
restraining effects from neighboring plasmon when p-polarized beam is irradiated to gold nanoparticle arrays with
optimal oblique incidence.
Tomoya Miyanishi,Mitsuhiro Terakawa,Minoru Obara,Nikolay N. Nedyalkov, andPetar A. Atanasov
"Directionally controlled plasmon excitation in gold nanoparticles for near-field nanopatterning by femtosecond laser", Proc. SPIE 7751, XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 77511X (15 November 2010); https://doi.org/10.1117/12.880738
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Tomoya Miyanishi, Mitsuhiro Terakawa, Minoru Obara, Nikolay N. Nedyalkov, Petar A. Atanasov, "Directionally controlled plasmon excitation in gold nanoparticles for near-field nanopatterning by femtosecond laser," Proc. SPIE 7751, XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 77511X (15 November 2010); https://doi.org/10.1117/12.880738