Paper
15 September 2010 Multi-layer far-infrared component technology
Robert E. Peale, Justin W. Cleary, Walter R. Buchwald, Andrew Davis, Sandy Wentzel, Bill Stacy, Oliver Edwards
Author Affiliations +
Abstract
Multi-layer thin-film optics based on alternating sub-wavelength layers of silicon and air provide high index contrast to create improved components with just a few layers. Applications include ultra-high reflectivity mirrors, band-pass and band-blocking filters, anti-reflection coatings, and compact high-resolution Fabry-Perot spectrometers with broad freespectral- range. Such components may be integrated directly into airborne/satellite and man-portable sensing instrumentation. We demonstrate a process to produce ultrathin silicon optical elements with an integral raised spacer rim to provide the requisite air gap when these elements are combined directly into a Bragg stack. Laboratory measurements confirm theoretical design specifications. Individual elements may be stacked and bonded to form Bragg mirrors and other thin-film optics.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert E. Peale, Justin W. Cleary, Walter R. Buchwald, Andrew Davis, Sandy Wentzel, Bill Stacy, and Oliver Edwards "Multi-layer far-infrared component technology", Proc. SPIE 7817, Nanophotonics and Macrophotonics for Space Environments IV, 78170D (15 September 2010); https://doi.org/10.1117/12.861598
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KEYWORDS
Silicon

Semiconducting wafers

Mirrors

Digital signal processing

Etching

Reflectivity

Fabry–Perot interferometers

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