Deep-etched fused silica gratings and applications

Changhe Zhou

doi:10.1117/12.869033

5 November 2010 Deep-etched fused silica gratings and applications

Changhe Zhou

Proceedings Volume 7848, Holography, Diffractive Optics, and Applications IV; 78480R (2010) https://doi.org/10.1117/12.869033
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

Deep-etched fused silica grating is a kind of high density phase gratings whose surface are etched into an optimized depth for achieving a series of novel functions, such as high efficient diffraction at the -1 order, polarizing beam splitting, 1x2, 1x3 beam splitting, etc.. Since deep-etched fused silica grating is made of pure dielectric material of fused silica, so it has a high laser damage threshold for high power laser applications. We fabricated the polarizing beam splitter of the fused silica grating and realized the even and odd modes for analysis of fused silica grating. We gave the generalized equations for describing the performance of polarizing beam splitting and high efficient diffraction at the -1 order. We gave the analytic equation of 1x3 diffraction, which is impossible to obtain with the previous rigorously coupled wave method. For fabrication of deep-etched fused silica gratings, holographic recording, lithographic technique, and inductively coupled plasma etching are used to make the deep-etched gratings. Deep-etched gratings have a variety of practical applications. It can be used for demultiplexing optical signals in DWDM optical fiber communications. It can also be used as a pulse compressor of femtosecond or picosecond laser pulses. It can also be used as polarizing beam splitter, high efficient diffraction for spectrometer, etc.. Deep-etched fused silica gratings have a bright future for practical applications.

Citation Download Citation

Changhe Zhou "Deep-etched fused silica gratings and applications", Proc. SPIE 7848, Holography, Diffractive Optics, and Applications IV, 78480R (5 November 2010); https://doi.org/10.1117/12.869033

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available