Optical system design of surface roughness photoelectric inspection instrument

Ze-xin Xiao; Peng Li; Jie Cao; Ran Xiao

doi:10.1117/12.871612

9 November 2010 Optical system design of surface roughness photoelectric inspection instrument

Ze-xin Xiao, Peng Li, Jie Cao, Ran Xiao

Proceedings Volume 7849, Optical Design and Testing IV; 78492U (2010) https://doi.org/10.1117/12.871612
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

The light-section method for roughness measurement is one of the most classical measuring methods. According to light-section method which combine visual observation with photomicrography for testing surface roughness, domestic type of 9J is a traditional device. The surface roughness photoelectric inspection instrument which designed by the authors are also based on the theory of light-section, which integrates subjects of optics, mechanical, electronics and calculation. Surface roughness of object image can be obtained on the CCD sensor through the optical system. Using the autonomous software in the computer, the average height of workpiece unevenness Ra value can be measured and read in the monitor. Therefor, surface roughness level can be obtained. In order to design the optical system of device, there are three main aspects which should be finished: 1.Start with requirements of detective object, according to the detective range from Ra12.5 to Ra0.04 ruled by CNS(China National Standards) GB3505-83 the Surface Roughness Term Surface and the Parameters ,parameters on β(magnify power), NA(numerical aperture), WD(work distance), filed of object etc are defined and optimized. Meanwhile, good complementation and compatibility are noticed among three kinds magnification objectives. 2. Special type infinity image distance double telecentricity optical system is constructed. The main point is to design a set of objectives of long WD and infinity image distance flat field semi-apochromat. 3. How to match and optimize the CCD image sensor and lens.

Citation Download Citation

Ze-xin Xiao, Peng Li, Jie Cao, and Ran Xiao "Optical system design of surface roughness photoelectric inspection instrument", Proc. SPIE 7849, Optical Design and Testing IV, 78492U (9 November 2010); https://doi.org/10.1117/12.871612

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KEYWORDS

Surface roughness

Objectives

CCD image sensors

Inspection

Optical design

Image sensors

Microscopes

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