Measuring micro displacement based on Moiré fringe

Shaojun Lu; Xiaolin Zhang; Rongli Guo; Lei Sun; Jun Han; Cunli Duan

doi:10.1117/12.871682

10 November 2010 Measuring micro displacement based on Moiré fringe

Shaojun Lu, Xiaolin Zhang, Rongli Guo, Lei Sun, Jun Han, Cunli Duan

Proceedings Volume 7850, Optoelectronic Imaging and Multimedia Technology; 78502P (2010) https://doi.org/10.1117/12.871682
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

It is important to accurately obtain micro displacement in industry, especially in numerical controlled machine. But traditional methods encountered some difficulties in high-precision measurement. A new approach based on moiré fringes digital image processing technique (DIP) is proposed in this paper. A smartly designed experiment is done to grasp moiré fringes from two same gratings, so complicated equipments are not necessary which has obvious advantages. A CCD is used to acquire digital images. Then the images are done by digital image processing, including filtering and gray-scale transformation, fringes identification. A smart way to calibrate the distance represented by each pixel is given in this paper with DIP technique. The distance of a certain fringe between two images is obtained to display the micro displacement of any object. The result of this approach is compared with a higher accurate micro displacement, their similarity identify the correct of this method. We are sure that the result will be more satisfactory if higher accurate equipment is applied in inspection.

Citation Download Citation

Shaojun Lu, Xiaolin Zhang, Rongli Guo, Lei Sun, Jun Han, and Cunli Duan "Measuring micro displacement based on Moiré fringe", Proc. SPIE 7850, Optoelectronic Imaging and Multimedia Technology, 78502P (10 November 2010); https://doi.org/10.1117/12.871682

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