A hand-held triangulation sensor for small features measurement

Gil Abramovich; Kevin Harding

doi:10.1117/12.872460

11 November 2010 A hand-held triangulation sensor for small features measurement

Gil Abramovich, Kevin Harding

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78550F (2010) https://doi.org/10.1117/12.872460
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

This paper describes progressive generations of hand held triangulation sensors for measuring small features, from edge breaks to corrosion pits. We describe the design considerations, ergonomics, packaging and interface between the device and part, such as the sensor tip and optional fixtures. We then present a customized design to address different types of surface features and defects. Next, we present the calibration concept, and its execution. The paper closes by summarizing system performance evaluation experiments and their results. It was shown that the system is capable of measuring edges down to a radius of 250 microns at a repeatability of 50 microns.

Citation Download Citation

Gil Abramovich and Kevin Harding "A hand-held triangulation sensor for small features measurement", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550F (11 November 2010); https://doi.org/10.1117/12.872460

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