Profile measurement based on spectral interferometer with multi-wavelength back-propagation methods

Kohei Otsuki; Samuel Choi; Osami Sasaki; Takamasa Suzuki

doi:10.1117/12.870987

11 November 2010 Profile measurement based on spectral interferometer with multi-wavelength back-propagation methods

Kohei Otsuki, Samuel Choi, Osami Sasaki, Takamasa Suzuki

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78550R (2010) https://doi.org/10.1117/12.870987
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

The multi-wavelength back-propagation (MWB) method enables to determine precisely the optical path different (OPD) longer than the optical wavelength from detecting the amplitude and phase of the interference signal for the multiple wavelengths. In this study, we demonstrate a 1-dimensional thickness profile measurement by the MWB and sinusoidal phase modulation (SPM) technique with a spectral interferometer. The OPD for the front and rear reflecting surfaces of a glass film with the thickness of 100 μm are measured. The thickness profile is successfully measured with repeatability of 2 nm estimated from a standard error between 9 repeatedly-measured profiles.

Citation Download Citation

Kohei Otsuki, Samuel Choi, Osami Sasaki, and Takamasa Suzuki "Profile measurement based on spectral interferometer with multi-wavelength back-propagation methods", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550R (11 November 2010); https://doi.org/10.1117/12.870987

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