New concept for in-line OLED manufacturing

U. Hoffmann; H. Landgraf; M. Campo; S. Keller; M. Koening

doi:10.1117/12.876623

9 February 2011 New concept for in-line OLED manufacturing

U. Hoffmann, H. Landgraf, M. Campo, S. Keller, M. Koening

Proceedings Volume 7954, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XV; 79540Z (2011) https://doi.org/10.1117/12.876623
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

A new concept of a vertical In-Line deposition machine for large area white OLED production has been developed. The concept targets manufacturing on large substrates (≥ Gen 4, 750 x 920 mm²) using linear deposition source achieving a total material utilization of ≥ 50 % and tact time down to 80 seconds. The continuously improved linear evaporation sources for the organic material achieve thickness uniformity on Gen 4 substrate of better than ± 3 % and stable deposition rates down to less than 0.1 nm m/min and up to more than 100 nm m/min. For Lithium-Fluoride but also for other high evaporation temperature materials like Magnesium or Silver a linear source with uniformity better than ± 3 % has been developed. For Aluminum we integrated a vertical oriented point source using wire feed to achieve high (> 150 nm m/min) and stable deposition rates. The machine concept includes a new vertical vacuum handling and alignment system for Gen 4 shadow masks. A complete alignment cycle for the mask can be done in less than one minute achieving alignment accuracy in the range of several 10 μm.

Citation Download Citation

U. Hoffmann, H. Landgraf, M. Campo, S. Keller, and M. Koening "New concept for in-line OLED manufacturing", Proc. SPIE 7954, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XV, 79540Z (9 February 2011); https://doi.org/10.1117/12.876623

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