High-sensitivity temperature sensing by employing an on-chip high-Q PDMS-coated toroidal microcavity

Bei-Bei Li; Qing-Yan Wang; Xue-Feng Jiang; Qihuang Gong; Yun-Feng Xiao

doi:10.1117/12.886258

16 May 2011 High-sensitivity temperature sensing by employing an on-chip high-Q PDMS-coated toroidal microcavity

Bei-Bei Li, Qing-Yan Wang, Xue-Feng Jiang, Qihuang Gong, Yun-Feng Xiao

Proceedings Volume 8034, Photonic Microdevices/Microstructures for Sensing III; 80340J (2011) https://doi.org/10.1117/12.886258
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

A high-sensitivity temperature sensor is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon chip. Combining both the advantages of the WGM microcavity (with ultrahigh Q factor) and PDMS (with large thermal effect), the PDMS-coated microresonator is highly sensitive to the temperature change of the surroundings. We find that, when the PDMS layer becomes thicker, the fundamental WGM experiences a transition from red- to blue-shift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultra-high resolution of the temperature sensor is also analyzed to reach 10^-4 K. With both high sensitivity and resolution, the thermal sensor can be employed to monitor a slight temperature variation which cannot be realized with conventional temperature sensor. Its on-chip feature can also fulfill the demand for integration and miniaturization in optics.

Citation Download Citation

Bei-Bei Li, Qing-Yan Wang, Xue-Feng Jiang, Qihuang Gong, and Yun-Feng Xiao "High-sensitivity temperature sensing by employing an on-chip high-Q PDMS-coated toroidal microcavity", Proc. SPIE 8034, Photonic Microdevices/Microstructures for Sensing III, 80340J (16 May 2011); https://doi.org/10.1117/12.886258

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